Title :
High-frequency transducers based on integrated piezoelectric thick films for medical imaging
Author :
Maréchal, Pierre ; Levassort, Franck ; Holc, Janez ; Tran-Huu-Hue, Louis-Pascal ; Kosec, Marija ; Lethiecq, Marc
Author_Institution :
Lab. of Ultrasound Signal & Instrumentation, Fracois-Rabelais Univ., Tours
Abstract :
A screen-printed PZT thick film with a final thickness of about 40 mum was deposited on a porous PZT substrate to obtain an integrated structure for ultrasonic transducer applications. This process makes it possible to decrease the number of steps in the fabrication of high-frequency, single-element transducers. The porous PZT substrates allow high acoustic impedance and attenuation to be obtained, satisfying transducer backing requirements for medical imaging. The piezoelectric thick films deliver high electromechanical performance, comparable to that of standard bulk ceramics (thickness coupling factor over 45%). Based on these structures, high-frequency transducers with a center frequency of about 25 MHz were produced and characterized. As a result, good sensitivity and axial resolution were obtained in comparison with similar transducers integrating a lead titanate (PT) disk as active material. The two transducers were integrated into a high-frequency imaging system, and comparative skin images are shown
Keywords :
acoustic impedance; biomedical ultrasonics; lead compounds; piezoelectric materials; piezoelectric transducers; skin; thick film devices; ultrasonic transducers; PZT; PbZrO3TiO3; acoustic attenuation; axial resolution; good system sensitivity; high acoustic impedance; high electromechanical performance; high-frequency transducers; integrated piezoelectric thick films; medical imaging; porous PZT substrate; screen-printed PZT thick film; skin images; transducer backing requirements; ultrasonic transducer applications; Acoustic transducers; Biomedical acoustics; Biomedical imaging; Biomedical transducers; Fabrication; Impedance; Piezoelectric transducers; Substrates; Thick films; Ultrasonic transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1665110