Title :
Location-resolvable optical monitored growth of multiple-wavelength vertical-cavity laser arrays
Author :
Yuen, W. ; Li, G.S. ; Chang-Hasnain, Connie J.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA
fDate :
10/12/1995 12:00:00 AM
Abstract :
Multiple-wavelength vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a location-resolvable in situ optical calibration method and a patterned-substrate growth technique in a molecular beam epitaxy (MBE) system. The high and low wavelength limits are achieved within 0.28% accuracy and with a 2.66 Å wavelength standard deviation from 4×35 arrays
Keywords :
molecular beam epitaxial growth; semiconductor growth; semiconductor laser arrays; surface emitting lasers; wavelength division multiplexing; VCSEL arrays; molecular beam epitaxy; multiple-wavelength vertical-cavity laser arrays; optical calibration method; optical monitored growth; patterned-substrate growth technique; vertical-cavity surface-emitting laser arrays; wavelength limits; wavelength standard deviation;
Journal_Title :
Electronics Letters
