Title :
High-speed integrated circuit probing using a scanning force microscope sampler
Author :
Ho, F. ; Hou, A.S. ; Bloom, D.M.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA
fDate :
3/31/1994 12:00:00 AM
Abstract :
Using a scanning force microscope as a high-speed all-electrical sampler, the authors have probed voltages on internal nodes of integrated circuits. The authors have demonstrated non-invasive probing through a passivating layer and probing of an Intel 80486 microprocessor
Keywords :
CMOS integrated circuits; atomic force microscopy; integrated circuit testing; voltage measurement; Intel 80486 microprocessor; high-speed all-electrical sampler; high-speed integrated circuit probing; integrated circuits; internal nodes; noninvasive probing; passivating layer; scanning force microscope sampler; voltage probing;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19940408
