• DocumentCode
    1067423
  • Title

    High-speed integrated circuit probing using a scanning force microscope sampler

  • Author

    Ho, F. ; Hou, A.S. ; Bloom, D.M.

  • Author_Institution
    Edward L. Ginzton Lab., Stanford Univ., CA
  • Volume
    30
  • Issue
    7
  • fYear
    1994
  • fDate
    3/31/1994 12:00:00 AM
  • Firstpage
    560
  • Lastpage
    562
  • Abstract
    Using a scanning force microscope as a high-speed all-electrical sampler, the authors have probed voltages on internal nodes of integrated circuits. The authors have demonstrated non-invasive probing through a passivating layer and probing of an Intel 80486 microprocessor
  • Keywords
    CMOS integrated circuits; atomic force microscopy; integrated circuit testing; voltage measurement; Intel 80486 microprocessor; high-speed all-electrical sampler; high-speed integrated circuit probing; integrated circuits; internal nodes; noninvasive probing; passivating layer; scanning force microscope sampler; voltage probing;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19940408
  • Filename
    280599
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1067423