Title :
Low loss achieved in sol-gel based silica-on-silicon integrated optics using borophosphosilicate glass
Author :
Syms, Richard R. A. ; Schneider, V. ; Huang, Wei ; Holmes, A.S.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London
fDate :
10/12/1995 12:00:00 AM
Abstract :
Polarisation-independent propagation losses of 0.2 dB/cm are reported for near-infrared silica-on-silicon channel guides formed using sol-gel borophosphosilicate glass deposited by repetitive spin coating and rapid thermal annealing. The low loss is ascribed to a reduction in process temperature, which has allowed a total glass thickness of 30 μm. The use of two dopants allows the glass viscosity to be adjusted independently of its refractive index, simplifying reflow and burial
Keywords :
borosilicate glasses; integrated optics; optical fabrication; optical losses; optical waveguides; phosphosilicate glasses; rapid thermal annealing; silicon; silicon compounds; sol-gel processing; viscosity; 30 micron; B2O3-P2O5-SiO2; BPSG; SiO2-Si; borophosphosilicate glass; dopants; glass viscosity; low loss; near-infrared channel guides; polarisation-independent propagation losses; rapid thermal annealing; repetitive spin coating; silica-on-Si integrated optics; sol-gel deposition;
Journal_Title :
Electronics Letters
