Title :
Demonstration of blazing effect in detuned second order gratings
Author :
Hagberg, M. ; Eriksson, N. ; Kjellberg, T. ; Larsson, A.G.
Author_Institution :
Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg
fDate :
3/31/1994 12:00:00 AM
Abstract :
Surface-emitting InGaAs/AlGaAs lasers with two first order gratings as feedback elements followed by one detuned second order blazed grating as output window were fabricated using electron beam lithography and chemically assisted ion beam etching. A strong dependence of the surface emission efficiency on the blazed grating orientation was observed
Keywords :
III-V semiconductors; aluminium compounds; diffraction gratings; electron beam lithography; gallium arsenide; indium compounds; semiconductor lasers; sputter etching; InGaAs-AlGaAs; blazed grating orientation; blazing effect; chemically assisted ion beam etching; detuned second order blazed grating; detuned second order gratings; electron beam lithography; feedback elements; first order gratings; output window; surface emission efficiency; surface-emitting InGaAs/AlGaAs lasers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19940381
