DocumentCode
1068064
Title
Standardized terminology for oxide charges associated with thermally oxidized silicon
Author
Deal, Bruce E.
Author_Institution
Fairchild Camera and Instrument Corporation, Palo Alto, CA
Volume
27
Issue
3
fYear
1980
fDate
3/1/1980 12:00:00 AM
Firstpage
606
Lastpage
608
Abstract
Standarized terminology for oxide charges associated with the thermally oxidized silicon system is presented. This terminology is recommended by a committee established by the Electronics Division of the Electrochemical Society and the IEEE Semiconductor Interface Specialists Conference. All engineers and scientists concerned with oxide charges in silicon semiconductor applications are urged to adopt this terminology.
Keywords
Cameras; Instruments; Laboratories; MOSFETs; Meetings; NIST; Silicon; Societies; Telephony; Terminology;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.19908
Filename
1480701
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