Title :
Design and Operation of RSFQ Cell Library Fabricated by Using a 10-kA/cm2 Nb Technology
Author :
Maezawa, Masaaki ; Ochiai, Masayuki ; Kimura, Hiroe ; Hirayama, Fuminori ; Suzuki, Motohiro
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
fDate :
6/1/2007 12:00:00 AM
Abstract :
A 10-kA/cm2 Nb/AlOchi/Nb junction technology for rapid single flux quantum (RSFQ) integrated circuits has been developed. Modifying our standard 1.6-kA/cm2 cell library, we have implemented elementary cells used to build RSFQ digital-to-analog converters for ac voltage standard applications. The 10-kA/cm2 library cells have been fabricated by utilizing existing process tools. Correct operations of the circuits have been confirmed at low speed. The maximum operating frequencies evaluated by an average-voltage measurement technique were consistent with the scaling rules of RSFQ circuits.
Keywords :
Josephson effect; critical current density (superconductivity); digital-analogue conversion; integrated circuit design; niobium; superconducting integrated circuits; RSFQ cell library; average-voltage measurement technique; critical current density; digital-to-analog converter; junction technology; rapid single flux quantum; rapid single flux quantum,; superconductor integrated circuit; Chemical technology; Circuit synthesis; Fabrication; Foundries; Integrated circuit technology; Niobium; Planarization; Software libraries; Superconducting integrated circuits; Voltage; Cell library; digital-to-analog converter; high critical current density; rapid single flux quantum; superconductor integrated circuit;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2007.898716
