Title :
Method to extract MOSFET substrate resistance using DC data of base resistance in parasitic BJT
Author :
Jung, D. ; Cha, J.-Y. ; Cha, J.-Y. ; Lee, Sang-Rim
Author_Institution :
Dept. of Electron. Eng., Hankuk Univ. of Foreign Studies, Yongin
Abstract :
A new DC method is proposed to extract the substrate resistance in MOSFETs by using current-dependent base resistance of parasitic lateral bipolar junction transistor without a complex RF extraction method. The extracted substrate resistance values using the new method match well with those using the RF one, verifying the accuracy of the new method.
Keywords :
MOSFET; bipolar transistors; electric resistance; DC data; MOSFET; current-dependent base resistance; parasitic BJT; parasitic lateral bipolar junction transistor; substrate resistance;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20091975
