Title :
A Prototype Magnetically Levitated Superconducting Conveyer
Author :
Mori, Takashi ; Inoue, Atsushi ; Komori, Mochimitsu
Author_Institution :
Kyushu Inst. of Technol., Fukuoka
fDate :
6/1/2007 12:00:00 AM
Abstract :
A new type of magnetically levitated superconducting conveyer for wafer transportation is proposed. At present, wafer fabrication process is carried out in clean rooms. Magnetically levitated conveyer without any mechanical contacts is most useful in such clean rooms. Our system is designed to levitate wafers on a levitated stage with permanent magnets. Vibrations are suppressed by using PD (proportional and differential) control. This paper discusses a prototype magnetically levitated superconducting conveyer, its simulation results and its experimental results.
Keywords :
clean rooms; conveyors; high-temperature superconductors; magnetic levitation; permanent magnet machines; superconducting machines; clean rooms; differential control; levitated stage; magnetically levitated superconducting conveyer; permanent magnets; proportional control; wafer fabrication process; wafer transportation; Magnetic flux; Magnetic levitation; Magnetic sensors; Permanent magnets; Prototypes; Sensor systems; Superconducting coils; Superconducting magnetic energy storage; Superconducting magnets; Voltage; Conveyer; magnetic bearing; magnetic levitation; pinning effect; repulsive force; superconductor;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2007.898895
