Title :
Changes in stress and coercivity after annealing of amorphous Co(Zr, Nb) thin films deposited by RF sputtering
Author :
Materne, A. ; Moriceau, H. ; Blanchard, Brent ; Florestan, J.
Author_Institution :
CEA/IRDI/BP, Grenoble, France
fDate :
3/1/1988 12:00:00 AM
Abstract :
The variations of the coercivity and the stress of low-magnetostriction Co(Zr, Nb) thin films are investigated, for various values of the sputtering gas pressure, PAr, before and after annealing at 300 degrees C. The origin of the stresses and their implications for the coercivity and the anisotropy are discussed on the basis of inert gas incorporation, morphological features, and relaxation effects.
Keywords :
annealing; cobalt alloys; coercive force; magnetic anisotropy; magnetic properties of amorphous substances; magnetic thin films; niobium alloys; sputtered coatings; zirconium alloys; CoNbZr; amorphous sputtered thin films; anisotropy; annealing; coercivity; inert gas incorporation; morphological features; relaxation effects; sputtering gas pressure; stress; Amorphous materials; Anisotropic magnetoresistance; Annealing; Argon; Coercive force; Niobium; Radio frequency; Sputtering; Substrates; Tensile stress;
Journal_Title :
Magnetics, IEEE Transactions on
