DocumentCode
106969
Title
Drifting Ionization Zone in DC Magnetron Sputtering Discharges at Very Low Currents
Author
Anders, Andre ; Ni, Pavel ; Andersson, Jon
Author_Institution
Lawrence Berkeley Nat. Lab., Berkeley, CA, USA
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2578
Lastpage
2579
Abstract
Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no exception. While most recent studies focused on traveling ionization zones in high-power impulse magnetron sputtering, we show here fast camera images of magnetron discharges at very low current. A single drifting ionization zone is always present, even down to the threshold current of ~10 mA.
Keywords
discharges (electric); plasma diagnostics; plasma instability; plasma sources; plasma transport processes; sputtering; DC magnetron sputtering discharges; charged particle transport; drifting ionization zone; electric field; magnetic field; Discharges (electric); Ionization; Magnetic resonance imaging; Nickel; Plasmas; Saturation magnetization; Sputtering; Plasma diagnostics; plasma materials processing; plasma measurements; plasma sources; plasma stability;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2334601
Filename
6862905
Link To Document