Title :
Designing response surface model-based run-by-run controllers: a worst case approach
Author :
Baras, John S. ; Patel, Nital S.
Author_Institution :
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
fDate :
4/1/1996 12:00:00 AM
Abstract :
This paper presents a framework for carrying out run-by-run (RbR) control via a deterministic worst-case approach. In particular the RbR controller developed tries to minimize the worst-case performance of the plant. This yields a methodology for handling uncertainty. A consequence of using the deterministic approach is that we no longer need any assumptions on the statistics of the noise. Rather, what we require is that the noise be bounded. Thus, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares (RLS) based controller
Keywords :
Gaussian noise; control system synthesis; electronics industry; model reference adaptive control systems; process control; uncertain systems; uncertainty handling; correlated noise; deterministic worst-case approach; noise statistics; nonGaussian noise; response surface model; run-by-run controllers; semiconductor industry; uncertainty handling; Automatic control; Computer aided software engineering; Control charts; Gaussian noise; Least squares methods; Process control; Response surface methodology; Semiconductor device noise; Statistics; Uncertainty;
Journal_Title :
Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
DOI :
10.1109/3476.507145