DocumentCode
1069762
Title
An evaluation of submicrometer potential barriers using charge-transfer devices
Author
Taylor, Geoffrey W. ; Chatterjee, Pallab K.
Author_Institution
Bell Laboratories, Murray Hill, NJ
Volume
27
Issue
8
fYear
1980
fDate
8/1/1980 12:00:00 AM
Firstpage
1579
Lastpage
1585
Abstract
A technique is described to investigate the charge dynamics over submicrometer potential barriers using transfer efficiency measurements in charge-transfer devices when they are operating near to their theoretical minimum clock voltages. In this range of operation it is shown that the efficiency of the device is limited by undesirable potential discontinuities in the interelectrode gaps which greatly depend on the means of fabrication. Using a simple analysis of time-dependent subthreshold conduction it is shown how to determine the parameters of the barrier and to understand its dependence on the electrode potentials. The use of this technique to determine the barrier parameters is demonstrated using measurements of Qloss versus temperature, frequency, and voltage. It is also shown how to use the technique to distinguish between barrier losses and interface state losses.
Keywords
Charge carrier processes; Charge coupled devices; Charge measurement; Clocks; Current measurement; Electrodes; Fabrication; Q measurement; Subthreshold current; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.20073
Filename
1480866
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