DocumentCode
1070172
Title
New micromachined membrane switches in silicon technology
Author
Hiltmann, Kai ; Schumacher, Axel ; Guttmann, Kai ; Lemp, Engelbert ; Sandmaier, Hermann ; Lang, Walter
Author_Institution
HSG-IMIT, Villingen, Germany
Volume
25
Issue
3
fYear
2002
fDate
9/1/2002 12:00:00 AM
Firstpage
397
Lastpage
401
Abstract
Presents a new generation of micromachined membrane switches containing a glass substrate and a silicon membrane. Upon external actuation, two planar substrate contacts are closed by a metal layer deposited on the switching membrane. The switching position is constant to better than 1 μm and has been observed to move about 0.7 μm over the achieved lifetime of 20 million electromechanical cycles under electrical loads of 12 V and 10 mA.
Keywords
micromachining; microswitches; semiconductor switches; 10 mA; 12 V; Si; electrical loads; electromechanical cycles; external actuation; micromachined membrane switches; planar substrate contacts; switching membrane; switching position; Biomembranes; Contacts; Etching; Glass; Manufacturing; Relays; Semiconductor thin films; Silicon; Substrates; Switches;
fLanguage
English
Journal_Title
Components and Packaging Technologies, IEEE Transactions on
Publisher
ieee
ISSN
1521-3331
Type
jour
DOI
10.1109/TCAPT.2002.804611
Filename
1159173
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