DocumentCode
1070192
Title
SRC collaborations paving the way
Author
Hillenius, Steven ; Herr, Dan ; Weitzman, Betsy ; Welser, Jeffrey
Volume
1
Issue
1
fYear
2007
Firstpage
6
Lastpage
12
Abstract
SRC has a 25-year history of supporting university research to benefit the semiconductor industry. Current research programs are heavily invested in nanotechnology research to supply solutions to patterning, manufacturing control, and device design problems that are potential barriers to continued productivity and applications for semiconductors.
Keywords
nanopatterning; nanotechnology; research and development; semiconductor technology; SRC collaborations; Semiconductor Research Corporation; nanopatterning; nanotechnology research; semiconductor industry; university research; CMOS integrated circuits; Collaboration; Fellows; Government; Lifting equipment; Manufacturing industries; Nanoelectronics; Nanotechnology; Portfolios; Semiconductor materials;
fLanguage
English
Journal_Title
Nanotechnology Magazine, IEEE
Publisher
ieee
ISSN
1932-4510
Type
jour
DOI
10.1109/MNANO.2007.912096
Filename
4451723
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