• DocumentCode
    1070479
  • Title

    Fabrication of Nb variable-thickness- and point-contact-type bridges by means of microfabrication technology

  • Author

    Gamo, K. ; Harada, T. ; Arimoto, K. ; Namba, S.

  • Author_Institution
    Osaka University, Toyonaka, Osaka, Japan
  • Volume
    27
  • Issue
    10
  • fYear
    1980
  • fDate
    10/1/1980 12:00:00 AM
  • Firstpage
    2033
  • Lastpage
    2035
  • Abstract
    Niobium-based techniques for fabrication of two different types of metal-coupled Josephson junctions are presented. Electrical characteristics are reported and it is noted that the device resistance is an order of magnitude or more higher than would be expected for both devices.
  • Keywords
    Bridge circuits; Chromium; Fabrication; Gold; Insulation; Niobium; Plasma applications; Radio frequency; Resists; Sputter etching;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1980.20143
  • Filename
    1480936
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1070479