DocumentCode :
1070637
Title :
Electrical properties of a triode-like silicon vertical-channel JFET
Author :
Ozawa, Osamu
Author_Institution :
Toshiba Corp., Kawasaki-shi, Japan
Volume :
27
Issue :
11
fYear :
1980
fDate :
11/1/1980 12:00:00 AM
Firstpage :
2115
Lastpage :
2123
Abstract :
A transition from triode-like to pentode-like I_{d}-V_{d} characteristics is observed in diffusion-type vertical JFET\´s by varying the channel impurity concentration from 5 × 1014to 5 × 1015cm-3. In calculated I_{d}-V_{d} characteristics of a low concentration and short-channel JFET, Geurst\´s theory has been shown to agree qualitatively with the experimental curves. In a triode-like JFET, drain currents show two distinct drain-voltage-dependent regions. It has an exponential dependency when the drain current is less than 0.2 mA . cm-1. It has an n th power depndency on the drain voltage when the drain current is larger than 5 mA . cm-1. Other important electrical properties are also calculated and compared with experimental data.
Keywords :
Breakdown voltage; Capacitance; Electron emission; FETs; Fabrication; Helium; Region 6; Semiconductor impurities; Shape; Silicon;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1980.20158
Filename :
1480951
Link To Document :
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