Title :
MA-11 the integrated circuit—past, present, and future
fDate :
11/1/1980 12:00:00 AM
Keywords :
Apertures; CMOS technology; Circuits; Coherence; Lithography; Optical films; Optical refraction; Resists; Silicon on insulator technology; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20172
