DocumentCode :
1070789
Title :
MA-13 silicon-on-insulator device structures
Author :
Tasch, A.F.
Volume :
27
Issue :
11
fYear :
1980
fDate :
11/1/1980 12:00:00 AM
Firstpage :
2176
Lastpage :
2176
Keywords :
CMOS technology; Costs; Instruments; Insulation; MESFETs; Microwave circuits; Microwave devices; Parasitic capacitance; Silicon on insulator technology; Very large scale integration;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1980.20174
Filename :
1480967
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1070789