DocumentCode
1071163
Title
TP-A4 direct writing of micrometer-sized highly doped regions on semiconductors by UV-laser photodeposition
Author
Ehrlich, D.J. ; Osgood, R.M. ; Deutsch, T.F.
Volume
27
Issue
11
fYear
1980
fDate
11/1/1980 12:00:00 AM
Firstpage
2189
Lastpage
2189
Keywords
Frequency; Gas lasers; Laboratories; Ohmic contacts; Optical surface waves; Semiconductor device doping; Semiconductor lasers; Surface emitting lasers; Tin; Writing;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1980.20209
Filename
1481002
Link To Document