DocumentCode

1071173

Title

TP-A5 nonalloyed ohmic contacts to n-GaAs by CW laser-assisted diffusion from a SnO2/SiO2source

Author

Nissim, Y.I. ; Gibbons, J.F. ; Gold, R.B.

Volume

27

Issue

11

fYear

1980

fDate

11/1/1980 12:00:00 AM

Firstpage

2189

Lastpage

2190

Keywords

Annealing; Contact resistance; Crystalline materials; FETs; Gallium arsenide; Gold; Ohmic contacts; Optical microscopy; Power lasers; Tin;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1980.20210

Filename

1481003