• DocumentCode
    1071180
  • Title

    TP-A3 capless annealing of GaAs using a controlled excess as vapor pressure source

  • Author

    Rupprecht, H. ; Woodall, J.

  • Volume
    27
  • Issue
    11
  • fYear
    1980
  • fDate
    11/1/1980 12:00:00 AM
  • Firstpage
    2189
  • Lastpage
    2189
  • Keywords
    Annealing; Gallium arsenide; Impurities; Ohmic contacts; Optical surface waves; Pressure control; Semiconductor device doping; Semiconductor lasers; Surface emitting lasers; Thermal decomposition;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1980.20211
  • Filename
    1481004