Title :
WA-A4 Electrical trimming of polycrystalline Silicon resistors and its application to analog IC´s
Author :
Kato, Kazuhiko ; Ono, Takahito ; Amemiya, Yoshiteru
fDate :
11/1/1980 12:00:00 AM
Keywords :
Analog integrated circuits; Application specific integrated circuits; Atomic layer deposition; Doping; Electric resistance; Fabrication; Impurities; Resistors; Resists; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1980.20224
