The calculation of the impedance of an induction plasma installation by a hybrid finite-element boundary-element method

Author

Fouladgar, Javad ; Chentouf, J. Fouladgar A

Author_Institution

Lab. de Recherche de Tech. Inductives, Saint-Nazaire, France

Volume

29

Issue

6

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

2479

Lastpage

2481

Abstract

A hybrid finite-element, boundary-element (FE-BE) analysis in a RF induction plasma is developed to predict the current distribution in an inductor and a plasma and to calculate the impedance of an entire installation. The electromagnetic and heat transfer equations are solved by the FE method inside the plasma, and the BE method is used to calculate the boundary conditions. To preserve the sparse and positive definite matrix structure of the FE method, an iterative algorithm is used to solve the coupled matrix equations

Keywords

boundary-elements methods; boundary-value problems; current distribution; eddy currents; electric impedance; electromagnetic fields; finite element analysis; iterative methods; plasma devices; plasma simulation; plasma transport processes; EM equations; ICP torch; RF induction plasma; boundary conditions; coupled matrix equations; current distribution; eddy currents; heat transfer equations; hybrid finite-element boundary-element method; impedance; induction plasma installation; iterative algorithm; Current distribution; Electromagnetic heating; Equations; Finite element methods; Impedance; Inductors; Iron; Plasmas; Radio frequency; Sparse matrices;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.280977

Filename

280977