DocumentCode
1072099
Title
Photographic Ag photodoping of amorphous As2 S3 films
Author
Masters, J.I. ; Goldberg, G.M. ; Lavine, J.M.
Author_Institution
Ionomet Company, Inc., Brighton, MA
Volume
1
Issue
4
fYear
1980
fDate
4/1/1980 12:00:00 AM
Firstpage
61
Lastpage
62
Abstract
It has been previously shown that negative relief images in As2 S3 layers can obtain from photodoping of As2 S3 with silver derived from evaporated silver halide films. In this letter we show that the effective speed of the process can be increased by several orders of magnitude by the addition of a photographic development step to generate a high resolution silver image prior to photodoping. Under these conditions the photodoping is performed by flood rather than imaging light. One of the consequences of the increase in speed is a resolution limited by the Ag halide line structure.
Keywords
Amorphous materials; Chemicals; Diffusion processes; Etching; Floods; Glass; Image resolution; Optical films; Resistance; Silver;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1980.25230
Filename
1481092
Link To Document