• DocumentCode
    1072099
  • Title

    Photographic Ag photodoping of amorphous As2S3films

  • Author

    Masters, J.I. ; Goldberg, G.M. ; Lavine, J.M.

  • Author_Institution
    Ionomet Company, Inc., Brighton, MA
  • Volume
    1
  • Issue
    4
  • fYear
    1980
  • fDate
    4/1/1980 12:00:00 AM
  • Firstpage
    61
  • Lastpage
    62
  • Abstract
    It has been previously shown that negative relief images in As2S3layers can obtain from photodoping of As2S3with silver derived from evaporated silver halide films. In this letter we show that the effective speed of the process can be increased by several orders of magnitude by the addition of a photographic development step to generate a high resolution silver image prior to photodoping. Under these conditions the photodoping is performed by flood rather than imaging light. One of the consequences of the increase in speed is a resolution limited by the Ag halide line structure.
  • Keywords
    Amorphous materials; Chemicals; Diffusion processes; Etching; Floods; Glass; Image resolution; Optical films; Resistance; Silver;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1980.25230
  • Filename
    1481092