DocumentCode

1072217

Title

Laser annealing of copper alloy 510

Author

Tice, E.

Author_Institution

Western Electric Co.,Princeton, NJ, USA

Volume

13

Issue

9

fYear

1977

fDate

9/1/1977 12:00:00 AM

Firstpage

813

Lastpage

814

Keywords

Annealing; Bonding; Copper alloys; Dielectric thin films; Interference; Machining; Optical pulses; Pulsed laser deposition; Silicon; Springs;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1977.1069623

Filename

1069623