DocumentCode

1072236

Title

Interference effects in laser micromachining of thin film composite structures

Author

Kestenbaum, A.

Author_Institution

Western Electric Co.,Princeton, NJ, USA

Volume

13

Issue

9

fYear

1977

fDate

9/1/1977 12:00:00 AM

Firstpage

813

Lastpage

813

Keywords

Annealing; Bonding; Interference; Micromachining; Optical pulses; Phosphors; Springs; Testing; Thin film circuits; Transistors;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1977.1069625

Filename

1069625