The effect of annealing on moment density and phase formations in Fe-N films

Author

Gao, Cheng ; Shamsuzzoha, Mohammad

Author_Institution

Alabama Univ., Tuscaloosa, AL

Volume

29

Issue

6

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

3046

Lastpage

3048

Abstract

Fe-N films are prepared by argon-nitrogen reactive RF sputtering at a total pressure of 6 mTorr, an argon flow rate of 100 standard cubic centimeters per minute (sccm) and a nitrogen flow rate R of 0 to 30 sccm. For R⩽15 sccm, little changes in phase structure and moment (Δσ⩽6%) are seen for annealing temperatures T_A⩽300°C. Above 300°C, changes in the phase structure and moment (Δσ_s⩾12%) are observed. For R=30 sccm, no phase changes are observed at all annealing temperatures and the moment is found to be constant (Δσ_s⩽5%). The phases observed by X-ray and transmission electron diffraction depend on R and include α-Fe(N), Fe₁₆N₂ and Fe₄N. These data could be correlated with the moment. The Curie temperature of Fe₄N is 480~510°C, in good agreement with previous result

Keywords

Curie temperature; X-ray diffraction examination of materials; annealing; electron diffraction examination of materials; iron compounds; magnetic moments; magnetic thin films; solid-state phase transformations; sputter deposition; 450 C; 480 to 510 C; 6 mTorr; Ar flow rate; Ar-N₂; Curie temperature; Fe_xN_y films; N₂ flow rate; X-ray diffraction; annealing temperatures; magnetic moment density; phase formations; phase structure; reactive RF sputtering; transmission electron diffraction; Annealing; Argon; Electrical resistance measurement; Electrons; Information technology; Inorganic materials; Nitrogen; Radio frequency; Temperature; Transistors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.281112

Filename

281112