• DocumentCode
    1074043
  • Title

    Microstructures and soft magnetic properties of sputtered FeSiAlRuTi films

  • Author

    Lin, J.C. ; Chen, L.J. ; Tseng, M.R. ; Chen, C.J.

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • Volume
    29
  • Issue
    6
  • fYear
    1993
  • fDate
    11/1/1993 12:00:00 AM
  • Firstpage
    3553
  • Lastpage
    3555
  • Abstract
    The soft magnetic properties and microstructure changes in FeSiAlRuTi films due to post annealing treatments were investigated. It was found that the decrease of coercivity and increase of permeability of the films by annealing treatment are correlated to the reduction of dislocation density and formation of DO3 superlattice, rather than the grain coarsening or preferred orientation
  • Keywords
    aluminium alloys; annealing; coercive force; crystal microstructure; dislocation density; ferromagnetic properties of substances; iron alloys; magnetic permeability; magnetic thin films; ruthenium alloys; silicon alloys; sputtered coatings; titanium alloys; DO3 superlattice; FeSiAlRuTi; coercivity; dislocation density; microstructure changes; permeability; post annealing treatments; soft magnetic properties; sputtered FeSiAlRuTi films; Annealing; Coercive force; Magnetic films; Magnetic properties; Microstructure; Permeability; Saturation magnetization; Soft magnetic materials; Sputtering; Substrates;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.281227
  • Filename
    281227
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1074043