Title :
High coercivity Co-Mn modified γ-Fe2O3 thin films for high density recording
Author :
Chang, Wei-Der ; Chin, Tsung-Shune ; Deng, Ming-Cheng
Author_Institution :
Dept. of Mater. Sci. & Eng., Tsing Hua Univ., Hsinchu, Taiwan
fDate :
11/1/1993 12:00:00 AM
Abstract :
(Co,Mn) modified γ-Fe2O3 thin films with an in-plane coercivity of 2200 to 4000 Oe, a saturation magnetization of 250 to 310 emu/cm3, and a squareness ratio of 0.6 to 0.83 were prepared by DC-reactive magnetron sputtering. The films were deposited onto Si(100) and Corning #7059 glass substrates in an O2/Ar atmosphere by using alloy composite targets. Compositional adjustment, reduction-oxidation, and postannealing treatments were found to affect coercivity as well as other magnetic properties to different extents. Owing to their sound magnetic performance, these films are promising for applications in high density magnetic recording
Keywords :
X-ray diffraction examination of materials; annealing; cobalt; coercive force; ferrites; magnetic recording; magnetic thin films; magnetisation; manganese; oxidation; sputter deposition; (100) surface; (Fe,Co,Mn)2O3 films; (FeCoMn)2O3; Corning #7059 glass substrates; DC-reactive magnetron sputtering; O2/Ar atmosphere; Si; X-ray diffraction; alloy composite targets; high density recording; in-plane coercivity; inductively coupled plasma spectroscopy; magnetic recording; magnetic thin film; postannealing treatments; reduction-oxidation; saturation magnetization; squareness ratio; Annealing; Atmosphere; Coercive force; Cooling; Heat treatment; Magnetic films; Magnetic recording; Plasma measurements; Sputtering; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
