Title :
Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor
Author :
Tanaka, Terumitsu ; Hong, Yang-Ki ; Gee, Sung-Hoon ; Park, Mun-Hyoun ; Erickson, Dustin W. ; Byun, Chongwon
Author_Institution :
Dept. of Mater. Sci. & Eng., Univ. of Idaho, Moscow, ID, USA
fDate :
7/1/2004 12:00:00 AM
Abstract :
Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πMS=21.3 kG; Hk=215 Oe; and μdc´=100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ·cm.
Keywords :
Maxwell equations; ferromagnetic resonance; magnetic permeability; soft magnetic materials; thin film inductors; 100 nm; 3 GHz; Gilbert damping constant; Landau-Lifshitz-Gilbert equations; Maxwell equations; electrical resistivity; ferromagnetic resonance; ferromagnetic thin film inductors; film thickness; gigahertz frequency range; magnetic film properties; magnetic permeability; quality factor; thin film inductor; Conductivity; Damping; Frequency estimation; Magnetic analysis; Magnetic films; Magnetic properties; Maxwell equations; Permeability; Q factor; Thin film inductors; Ferromagnetic resonance; LLG equations; soft magnetic materials; thin film inductor;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.832251
