Analytical calculation for estimation of magnetic film properties for a 3-GHz thin film inductor

Author

Tanaka, Terumitsu ; Hong, Yang-Ki ; Gee, Sung-Hoon ; Park, Mun-Hyoun ; Erickson, Dustin W. ; Byun, Chongwon

Author_Institution

Dept. of Mater. Sci. & Eng., Univ. of Idaho, Moscow, ID, USA

Volume

40

Issue

4

fYear

2004

fDate

7/1/2004 12:00:00 AM

Firstpage

2005

Lastpage

2007

Abstract

Thickness, resistivity, and the Gilbert damping constant are estimated using Maxwell and Landau-Lifshitz-Gilbert (LLG) equations to meet operating parameters of ferromagnetic thin film inductors in the gigahertz frequency range. The following properties of soft magnetic film are calculated to satisfy a quality factor of 10 at 3 GHz: 4πM_S=21.3 kG; H_k=215 Oe; and μ_dc´=100. The complex permeability was not influenced by film thickness up to 100 nm. Operation frequency increases with the increase of electrical resistivity and decrease of film thickness. The Gilbert damping constant is found to have a significant effect on the operation frequency. The quality factor can be retained up to 3GHz for 100-nm-thick film with a damping constant of 0.015 when resistivity is greater than 50 μΩ·cm.

Keywords

Maxwell equations; ferromagnetic resonance; magnetic permeability; soft magnetic materials; thin film inductors; 100 nm; 3 GHz; Gilbert damping constant; Landau-Lifshitz-Gilbert equations; Maxwell equations; electrical resistivity; ferromagnetic resonance; ferromagnetic thin film inductors; film thickness; gigahertz frequency range; magnetic film properties; magnetic permeability; quality factor; thin film inductor; Conductivity; Damping; Frequency estimation; Magnetic analysis; Magnetic films; Magnetic properties; Maxwell equations; Permeability; Q factor; Thin film inductors; Ferromagnetic resonance; LLG equations; soft magnetic materials; thin film inductor;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2004.832251

Filename

1325387