Title :
Equilibrium of hinged and hingeless structures rotated using surface tension forces
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
12/1/1995 12:00:00 AM
Abstract :
Two different geometries for the rotation of microstructures by the surface tension force of molten solder are investigated theoretically and experimentally. The geometries are based on structures with and without a hinge acting to constrain the motion of a flap to pure rotation. The equilibrium geometry of a hinged structure is first found analytically by considering the surface energy of the solder. An analysis of hingeless structures is then performed that shows a hinge to be unnecessary under certain conditions. Macroscopic experiments performed using printed circuit board parts are then described; the results show that the behaviors of hinged and hingeless structures are similar
Keywords :
force; micromechanical devices; rotation; surface tension; equilibrium geometry; hinged structures; hingeless structures; microstructure rotation; molten solder; solder surface energy; surface tension forces; Chemicals; Dry etching; Fasteners; Geometry; Optical devices; Performance analysis; Printed circuits; Surface tension; Torque; Wet etching;
Journal_Title :
Microelectromechanical Systems, Journal of