Title :
The platinum doped MOST: A memory storage element
Author :
Nassibian, Armenag G. ; Jordan, David ; Golja, Bogdan ; Simmons, Jay G. ; Simmons, J.G.
Author_Institution :
University of Western Australia, Nedlands, Western Australia
fDate :
9/1/1981 12:00:00 AM
Abstract :
The effect of diffused platinum on MOSFET´s has been studied. The materials used were
Keywords :
Annealing; Conductivity; Fabrication; Hysteresis; Nitrogen; Oxidation; Platinum; Silicon; Stress; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1981.20477
