Title :
Properties of diamond-like carbon film and its application as a protective layer in thin-film magnetic recording disks
Author :
Kokaku, Yuichi ; Matsumoto, Hiroshi ; Inaba, Hiroshi ; Fujimaki, Shigehiko ; Kitoh, Makoto ; Abe, Katsuo
Author_Institution :
Hitachi Ltd., Yokohama, Japan
fDate :
11/1/1993 12:00:00 AM
Abstract :
Wear rate of diamond-like carbon (DLC) protective layer deposited by a radio frequency plasma enhanced chemical vapor deposition method has been evaluated by continuous sliding tests using spherical sapphire pins. The influence of each property such as microstructure and microhardness on wear durability of the film is discussed. It has been found that the wear durability of the DLC film is several times superior to that of conventional sputtered carbon film
Keywords :
CVD coatings; carbon; magnetic disc storage; protective coatings; wear testing; continuous sliding tests; microhardness; microstructure; plasma enhanced chemical vapor deposition; protective layer; spherical sapphire pins; thin-film magnetic recording disks; wear durability; Chemical vapor deposition; Diamond-like carbon; Microstructure; Pins; Plasma applications; Plasma chemistry; Plasma properties; Protection; Radio frequency; Testing;
Journal_Title :
Magnetics, IEEE Transactions on
