• DocumentCode
    1075521
  • Title

    The hardness of iron (N) films sputtered in Ar-N2 mixtures

  • Author

    Jones, R.E., Jr. ; White, R.L. ; Williams, J.L. ; Qian, X.-W.

  • Author_Institution
    Adstar-IBM, San Jose, CA, USA
  • Volume
    29
  • Issue
    6
  • fYear
    1993
  • fDate
    11/1/1993 12:00:00 AM
  • Firstpage
    3966
  • Lastpage
    3968
  • Abstract
    RF sputtered iron films can be significantly hardened from about 13 GPa to about 19 GPa by adding nitrogen to the sputtering atmosphere. The dependencies of hardness on the operating parameters for RF diode sputtering are reported. At a fixed bias the hardness depends only on the ratio of nitrogen partial pressure to iron deposition rate. The hardness correlates well with grain size, increasing for decreasing grain size
  • Keywords
    grain size; hardness testing; iron; magnetic heads; sputtered coatings; Ar; Ar-N2; Fe; N2; RF sputtered films; deposition rate; fixed bias; grain size; operating parameters; partial pressure; sputtering atmosphere; Atmosphere; Diodes; Grain size; Iron; Magnetic films; Magnetic heads; Nitrogen; Radio frequency; Sputtering; Substrates;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.281358
  • Filename
    281358
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1075521