Study of Stress and Morphology of Superconducting Niobium Thin Films

Author

Liu, Jianshe ; Li, Jinyang ; Li, Tianzong ; Li, Tiefu ; Wu, Wei ; Chen, Wei

Author_Institution

Dept. of Micro/Nanoelectron., Tsinghua Univ., Beijing, China

Volume

19

Issue

3

fYear

2009

fDate

6/1/2009 12:00:00 AM

Firstpage

245

Lastpage

248

Abstract

Intrinsic stress, surface morphology and crystallographic structure of superconducting thin films play an important role in determining the quality of their superconducting properties and the Josephson junctions made of them. Nb thin films deposited by DC magnetron sputtering with various deposition conditions were studied using curvature method, atomic force microscopy and X-ray diffraction. The role of sputtering pressure, gun operating parameters, substrate temperature and substrate materials on film morphology, crystallographic structure and intrinsic stress are investigated. Superconducting transition temperatures of the films were measured and relationship between the transition temperatures and deposition conditions were studied.

Keywords

Josephson effect; X-ray diffraction; atomic force microscopy; crystal structure; niobium; sputter deposition; stress effects; superconducting materials; superconducting thin films; superconducting transition temperature; surface morphology; DC magnetron sputtering; Josephson junction; Nb; X-ray diffraction; atomic force microscopy; crystallographic structure; curvature method; intrinsic stress; sputtering pressure; superconducting niobium thin film; superconducting transition temperature; surface morphology; Morphology; Nb; stress; thin film;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2009.2019233

Filename

5075612