Title :
Fe-implantation for rear-facet coatings of InP-based quantum cascade lasers
Author :
Wienold, M. ; Semtsiv, M.P. ; Dressler, S. ; Masselink, W.T. ; Potzger, K. ; Winnerl, S. ; Helm, M.
Author_Institution :
Humboldt Univ. Berlin, Berlin
Abstract :
Fe-implantation is used to create a high-resistivity layer at the rear facet of an InP-based quantum cascade laser (lambda = 3.9 mum), subsequently coated with a metallisation of Cr (5 nm) and Au (200 nm). The coatings lead to a 3.7-fold increase of front-facet power and a 20-30% reduction in threshold current density compared to uncoated lasers.
Keywords :
III-V semiconductors; chromium; coating techniques; gold; indium compounds; iron; metallisation; quantum cascade lasers; Au; Cr; Fe; InP; coated laser; high-resistivity layer; iron implantation; metallisation; quantum cascade lasers; rear-facet coatings;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20083589
