DocumentCode
1075759
Title
IIIB-1 Electrical characteristics of small geometry MOSFETs with a bird´s-beak free and fully recessed isolation structure
Author
Chiu, K.Y. ; Manoliu, J. ; Moll, Jonas
Volume
28
Issue
10
fYear
1981
fDate
10/1/1981 12:00:00 AM
Firstpage
1225
Lastpage
1226
Keywords
Electric variables; Etching; Geometry; Isolation technology; MOS devices; MOSFETs; Oxidation; Plasma applications; Silicon; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1981.20542
Filename
1481694
Link To Document