DocumentCode

1075960

Title

IVB-5 fatigued-induced defects in MNOS devices

Author

Ko, C.K. ; Senturia, S.D. ; Burns, J.A.

Author_Institution

Massachusetts Institute of Technology, Cambridge, MA

Volume

28

Issue

10

fYear

1981

fDate

10/1/1981 12:00:00 AM

Firstpage

1239

Lastpage

1239

Keywords

Capacitors; Electric variables; Etching; Fatigue; History; Laboratories; Optical microscopy; Scanning electron microscopy; Silicon; Stress;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1981.20562

Filename

1481714