DocumentCode

1075992

Title

IVB-8 microscopic redistribution of oxygen in silicon

Author

Furman, B.K. ; Magee, T.J.

Volume

28

Issue

10

fYear

1981

fDate

10/1/1981 12:00:00 AM

Firstpage

1241

Lastpage

1242

Keywords

Circuit testing; Electrons; Gettering; Implants; Indium phosphide; Integrated circuit technology; MISFETs; Microscopy; Oxygen; Silicon;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1981.20565

Filename

1481717