Title :
IVB-8 microscopic redistribution of oxygen in silicon
Author :
Furman, B.K. ; Magee, T.J.
fDate :
10/1/1981 12:00:00 AM
Keywords :
Circuit testing; Electrons; Gettering; Implants; Indium phosphide; Integrated circuit technology; MISFETs; Microscopy; Oxygen; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1981.20565
