VIA-2 rapid direct writing of surface relief structures in silicon using laser photoetching

Author

Ehrlich, D.J. ; Osgood, R.M. ; Deutsch, T.F.

Volume

Issue

fYear

1981

fDate

10/1/1981 12:00:00 AM

Firstpage

1253

Lastpage

1254

Keywords

Annealing; Chemical lasers; Conductive films; Etching; Gas lasers; Optical pulses; Semiconductor films; Silicon; Surface emitting lasers; Writing;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

DOI

10.1109/T-ED.1981.20581

Filename

1481733

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