DocumentCode

1076168

Title

VIA-1 focused-ion-beam processes for device fabrication

Author

Kubena, R.L. ; Anderson, C. Lindsay

Volume

28

Issue

10

fYear

1981

fDate

10/1/1981 12:00:00 AM

Firstpage

1253

Lastpage

1253

Keywords

Chemical lasers; Etching; Fabrication; Gallium arsenide; Gas lasers; Gold; Laboratories; Resists; Sea measurements; Sea surface;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1981.20582

Filename

1481734