• DocumentCode
    1076398
  • Title

    Operating and beam characteristics, including spectral narrowing, of a TEA rare-gas halide excimer laser

  • Author

    McKee, Terrence J. ; Banic, J. ; Jares, A. ; Stoicheff, B.P.

  • Author_Institution
    Lumonics Research Limited, Kanata, Ontario, Canada
  • Volume
    15
  • Issue
    5
  • fYear
    1979
  • fDate
    5/1/1979 12:00:00 AM
  • Firstpage
    332
  • Lastpage
    334
  • Abstract
    A simple TEA excimer laser has been developed having a fast discharge with distributed preionization. The output pulses are short (∼7 ns), of high peak power (5-15 MW), and good reproducibility. Narrow linewidth (<1 cm-1), and tunability (∼0.8 nm) have been obtained with KrF using a grating at grazing incidence.
  • Keywords
    Noble-gas lasers; Pulsed lasers; Anodes; Cathodes; Chemical lasers; Electrodes; Gas lasers; Inductance; Laser beams; Laser tuning; Pump lasers; Reproducibility of results;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1979.1070013
  • Filename
    1070013
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1076398