DocumentCode :
1076543
Title :
High resolution techniques for the fabrication of small area Josephson tunnel junctions
Author :
Hu, Evelyn L. ; Jackel, Lawrence D. ; Howard, Richard E.
Author_Institution :
Bell Laboratories, Holmdel, NJ
Volume :
28
Issue :
11
fYear :
1981
fDate :
11/1/1981 12:00:00 AM
Firstpage :
1382
Lastpage :
1385
Abstract :
Superconducting tunnel junction devices as small as 10-10cm2have been made using novel self-aligning techniques in conjunction with optical or e-beam lithography. This process has been used to fabricate complete circuits and multijunction arrays under well controlled conditions, using a single resist patterning step.
Keywords :
Counting circuits; Electrodes; High speed optical techniques; Lithography; Optical device fabrication; Optical films; Optical interferometry; Optical sensors; Resists; Substrates;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1981.20618
Filename :
1481770
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1076543
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