Title :
Pd-MOS hydrogen and hydrocarbon sensor device
Author :
Poteat, T.L. ; Lalevic, B.
Author_Institution :
Bell Laboratories, Murray Hill, NJ
fDate :
4/1/1981 12:00:00 AM
Abstract :
Work function changes in palladium-gate MOS devices are observed directly with a novel circuit. Adsorption and desorption times and sensitivities of devices exposed to partial pressures of hydrogen are presented. Reaction times and sensitivities to methane and butane are also given.
Keywords :
Capacitance; Channel bank filters; Circuits; Gas detectors; Hydrocarbons; Hydrogen; MOS capacitors; Nickel; Silicon; Voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1981.25349
