DocumentCode :
1077459
Title :
Improvements in aluminum-silicon Schottky barriers due to processing with a pulsed ruby laser
Author :
McGonigal, G.C. ; Card, H.C.
Author_Institution :
University of Manitoba, Manitoba, Canada
Volume :
2
Issue :
6
fYear :
1981
fDate :
6/1/1981 12:00:00 AM
Firstpage :
149
Lastpage :
151
Abstract :
Improvements in Schottky barrier characteristics (increases in barrier heights and reductions in n-values or ideality factors) have been obtained for aluminum-n-type silicon contacts upon irradiation of single (1 msec) pulses from a ruby laser (λ = 0.694 µm). Increases in φbof up to 0.2 volts and decreases in n by a factor of ≃ 2 have been observed for optical pulse energies in the range of 25-40 J cm-2.
Keywords :
Aluminum; Annealing; Contacts; Integrated circuit technology; Laser beams; Optical pulses; Research and development; Schottky barriers; Silicon; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/EDL.1981.25377
Filename :
1481861
Link To Document :
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