Title :
Improvements in aluminum-silicon Schottky barriers due to processing with a pulsed ruby laser
Author :
McGonigal, G.C. ; Card, H.C.
Author_Institution :
University of Manitoba, Manitoba, Canada
fDate :
6/1/1981 12:00:00 AM
Abstract :
Improvements in Schottky barrier characteristics (increases in barrier heights and reductions in n-values or ideality factors) have been obtained for aluminum-n-type silicon contacts upon irradiation of single (1 msec) pulses from a ruby laser (λ = 0.694 µm). Increases in φbof up to 0.2 volts and decreases in n by a factor of ≃ 2 have been observed for optical pulse energies in the range of 25-40 J cm-2.
Keywords :
Aluminum; Annealing; Contacts; Integrated circuit technology; Laser beams; Optical pulses; Research and development; Schottky barriers; Silicon; Voltage;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1981.25377