Title :
Calculation of shape anisotropy for micropatterned thin Fe-Ni films for on-chip RF applications
Author :
Vroubel, Marina ; Zhuang, Yan ; Rejaei, Behzad ; Burghartz, Joachim N. ; Crawford, Ankur M. ; Wang, Shan X.
Author_Institution :
Lab. of Electron. Components, Delft Univ. of Technol., Netherlands
fDate :
7/1/2004 12:00:00 AM
Abstract :
We present a self-consistent calculation of the effective anisotropy of patterned, integrated ferromagnetic films. For comparison, experimental data were obtained from electroplated thin (0.5 μm) Ni-Fe films with different patterns. The effective anisotropy of patterned samples was increased by shape demagnetizing effects from just 10 Oe up to 100 Oe. The samples with suitable characteristics were subsequently used as cores for on-chip inductors and microstrips.
Keywords :
demagnetisation; ferromagnetic materials; iron alloys; magnetic anisotropy; magnetic permeability; magnetic thin films; microstrip circuits; nickel alloys; thin film inductors; Fe-Ni; RF applications; electroplated thin films; integrated ferromagnetic films; magnetic anisotropy; magnetic permeability; magnetic thin films; microstrips; on-chip inductors; shape anisotropy; shape demagnetizing effects; Anisotropic magnetoresistance; Demagnetization; Magnetic anisotropy; Magnetic films; Magnetic resonance; Magnetization; Perpendicular magnetic anisotropy; Radio frequency; Shape; Thin film inductors; Demagnetization; magnetic anisotropy; magnetic permeability; magnetic thin films;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.835096
