Photopatternable Polymeric Membranes for Optical Oxygen Sensors

Author

Ambekar, Raghu ; Park, Jongwon ; Henthorn, David B. ; Kim, Chang-Soo

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL

Volume

9

Issue

2

fYear

2009

Firstpage

169

Lastpage

175

Abstract

A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.

Keywords

calibration; dyes; gas sensors; luminescence; membranes; micro-optomechanical devices; microfluidics; microsensors; optical fabrication; optical glass; optical polymers; optical sensors; oxygen; silicones; ultraviolet lithography; UV lithography; adhesion property; optical glass; optical oxygen sensors; optimum mixture composition; oxygen sensitive luminescent dyes; photopatternable polymeric membranes; photopolymer; self-calibration fluidic oxygen sensor; spin-on silicone fabrication; Biomedical optical imaging; Biomembranes; Chemical sensors; Chemical technology; Image sensors; Lithography; Optical polymers; Optical sensors; Oxygen; Sensor phenomena and characterization; Fluidics; oxygen; porphyrin; ruthenium; silicone;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2008.2011069

Filename

4757354