Title :
Photopatternable Polymeric Membranes for Optical Oxygen Sensors
Author :
Ambekar, Raghu ; Park, Jongwon ; Henthorn, David B. ; Kim, Chang-Soo
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL
Abstract :
A new class of optical oxygen sensor that can be photopatternable by traditional UV lithography is presented. They are fabricated using photopatternable spin-on silicone (polydimethylsiloxane, PDMS) with oxygen sensitive luminescent dyes. It has a good adhesion property and can be applied on glass or on photopolymer (SU-8) without any additional surface treatments. The optimum mixture composition for patternable oxygen sensitive membranes is investigated and its optical properties are characterized. Proof-of-concepts for two applications, intensity-based oxygen sensing with SU-8 based structure and self-calibration fluidic oxygen sensor, are described. These photopatternable optical membranes will find many applications wherever small patterns of oxygen sensitive membranes are required.
Keywords :
calibration; dyes; gas sensors; luminescence; membranes; micro-optomechanical devices; microfluidics; microsensors; optical fabrication; optical glass; optical polymers; optical sensors; oxygen; silicones; ultraviolet lithography; UV lithography; adhesion property; optical glass; optical oxygen sensors; optimum mixture composition; oxygen sensitive luminescent dyes; photopatternable polymeric membranes; photopolymer; self-calibration fluidic oxygen sensor; spin-on silicone fabrication; Biomedical optical imaging; Biomembranes; Chemical sensors; Chemical technology; Image sensors; Lithography; Optical polymers; Optical sensors; Oxygen; Sensor phenomena and characterization; Fluidics; oxygen; porphyrin; ruthenium; silicone;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2008.2011069
