On the magnetic saturation analyses of a micro linear switched-reluctance motor

To achieve low cost and high operational precisions in semiconductor fabrication industry, a new micro linear switched-reluctance motor (μLSRM) that can be integrated with the microelectromechanical system (MEMS) processing scheme has been designed and investigated. With both the degraded material property after electroplating process and the geometric constraints of MEMS being considered, magnetic saturation characteristics of the μLSRM were carefully analyzed by three-dimensional finite element analysis. Hence, the generated propulsive, normal, and guidance forces at those of the most feasible motor pole shapes and winding excitation levels can be evaluated to provide a thorough design and fabrication basis.