Title :
Large Fabrication Tolerance for VCSELs Using High-Contrast Grating
Author :
Zhou, Ye ; Huang, Michael C Y ; Chang-Hasnain, Connie J.
Author_Institution :
California Univ., Berkeley
fDate :
3/15/2008 12:00:00 AM
Abstract :
We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.
Keywords :
diffraction gratings; laser mirrors; surface emitting lasers; high-index-contrast subwavelength grating mirror; optical communication; vertical-cavity surface-emitting lasers; Distributed Bragg reflectors; Gratings; Mirrors; Optical device fabrication; Optical filters; Optical surface waves; Reflectivity; Semiconductor lasers; Surface emitting lasers; Vertical cavity surface emitting lasers; Gratings; mirrors; optical communication; optical microelectromechanical systems; vertical-cavity surface-emitting laser (VCSEL);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2008.916969
